Nano Mechanical Probing System
|  N-6000 Fine-structured Device Characteristic Evaluation System |
Transmission Electron Microscope
| HD-2300A UHR 200kV FE-STEM | H-7650 120 kV Automatic TEM |
Focused Ion Beam System
| FB-2100 FIB System |
Field Emission Scanning Electron Microscope
| S-5500 In-Lens FE-SEM | S-4800 UHR FE-SEM |
Variable Pressure Scanning Electron Microscope
| S-3700N Ultra Large VP-SEM | S-3400N Fully Automated VP-SEM |
Tabletop Microscope
| TM-1000 Tabletop Microscope |
|
|
Nano Mechanical Probing System |
N-6000 Fine-structured Device Characteristic Evaluation System
 |
|
Associated with higher circuit integration and density of semiconductor devices, there is a growing need for direct measurement of electrical characteristics of failure devices.
Features:
- The field emission ultra-high resolution SEM allows precise and efficient positioning of probes at high magnifications
- The system allows accommodation of up to 6 probes and is compatible for 90nm node devices
- An electronic image shift is large (or plus/minus 100microns) for precise probe positioning without manipulating the specimen stage
- The system incorporates a probe exchange chamber with airlock for prompt and efficient exchange of tungsten probes
|
|
|
Transmission Electron Microscope |
HD-2300A UHR 200kV FE-STEM
 |
|
Hitachi is proud to introduce the HD-2300, Hitachi´s newest high resolution, high throughput STEM designed for quick, comprehensive sample evaluation, with unmatched analytical capabilities and consistent high-end performance.
This second-generation 200kV STEM from Hitachi, surpasses current instrumentation in nanotechnology research, emphasising superior performance and enhanced user-friendly features of the previous HD-2000 model.
The HD-2300 is an essential instrument for the advancement of Nano-Technology in the 21st century.
Features:
- Quick observation
- Specimen exchange within 2 minutes
- High Voltage application in 3 minutes (standby condition to 200kV on)
- Automated column alignment
- Automated image viewing functions
- High resolution STEM and SEM images
- Nano-area electron diffraction: Simultaneous display with STEM image
- High sensitivity EDX analysis
- High speed and high sensitivity Hitachi Elements View EELS imaging system
|
H-7650 120 kV Automatic TEM
 |
|
This microscope is standard-equipped with a high sensitivity high resolution digital camera and incorporates a design for image observation with a high contrast and minimum beam dose. The digital camera is controlled by the PC on the main unit and can record an image appearing on the PC's display screen directly as a digital image. Ergonomically designed with comfortable operating environment.
Features:
- Resolution: 0204 nm (lattice image)
- Magnification: 50x to 600,000x
- Accelerating voltage: 40 to 120 kV
- Automatic functions such as auto focus, digital auto photo, and digital low dose
- Image database function
|
|
|
Focused Ion Beam System |
FB-2100 FIB System
 |
|
The FB-2100 allows rapid and precise specimen preparation for both transmission and scanning electron microscopy of semiconductors and other advanced materials.
Features:
- High precision and high milling rates
- The use of a new low aberration ion optical system allows a maximum beam current of 30 nA at an accelerating voltage of 40 kV
- A micro-sampling system is available as an option
- Site-specific micro-sampling preparation from bulk samples is achieved in a completely dry vacuum environment allowing preparation of samples, free from foreign particles, oxidation, charging and other problems
- Minimising specimen damage
- Compatible specimen holders for FB-2100 and Hitachi TEMs/SEMs are provided for specimen preparation with high precision and reliability. This arrangement allows milling and microscopy without specimen repositioning, thereby minimising specimen damage during repeated preparation and microscopy
- A wide range of beam energies
- Operators can choose the optimum operating voltage (or energy) for milling and microscopy to best suit the specimen
|
|
|
Field Emission Scanning Electron Microscope |
S-5500 In-Lens FE-SEM
 |
|
Ultra-high resolution microscopy places special demands on the equipment used to capture new information and reveal the secrets of the Nano-world.
The new S-5500 meets these with proven technology, combining high resolution and easy, reliable operation, the S-5500 boasts a host of features and details, all designed to make high resolution microscopy and analysis easier.
Features:
- The world's highest resolution at 30kV: 0.4nm at 30kV guaranteed, 1.6nm at 1kV guaranteed
- Hitachi's unique variable Super ExB signal mode allows operator to optimise secondary and backscatter signal content of the image
- New BF/DF Duo-STEM detector allows simultaneous display of BF and DF images. Variable detection angle in DF STEM mode (option)
- Electron optical design allows EDS analysis and imaging without changing specimen position
- FIB compatible holders for seamless imaging of targeted preparation sites (option)
|
S-4800 UHR FE-SEM
 |
|
The Hitachi S-4800 is a truly versatile platform comprising impressive high resolution performance, advanced detection technology and a user interface that makes it possible to capture even the most short-lived moments accurately and clearly.
It employs a semi-in-lens design for large sample accommodation while achieving ultra-high resolution comparable to performance only available with in-lens UHR SEMs.
Features:
- A new objective lens design with "Super ExB Filter" technology. Using a single detector, the Super ExB Filter collects and separates the various components of pure SE, compositional SE and BSE electron signals
- A guaranteed resolution of 1.0 nm at 15kV and 1.4 nm / 2.0 nm at 1kV (deceleration / standard mode) for low voltage applications. All performance specifications are guaranteed at customer's facilities
- A choice of specimen stage: Type I for small sample applications with 50mm x 50mm stage movement or type II for large sample applications with 110mm x 110mm stage movement and computer controlled 5 axes motorisation with graphical interface software
- Advanced dry vacuum system design including Turbo Molecular Pump (TMP)
- A new GUI design developed in consultation with users making the S-4800 the most advanced, user friendly UHR SEM available today
|
|
|
Variable Pressure Scanning Electron Microscope |
S-3700N Ultra Large VP-SEM
 |
|
The S-3700 electron optics and operational functions replicate the specification of the S-3400N - a popular model with sales of more than 300 units to date.
Features:
- Ultra large chamber and large tranverse stage that can accommodate large sample of 300mm in diameter and 110mm in height at analytical working distance of 10mm
- Observable area up to 203mm in diameter
- Observation and EDX analysis on a sample up to 110mm tall
- Unique chamber port : two ports for EDS, one port for WDS and one port for EBSP with six additional ports available for optional accessories. EDX, WDX and EBSP simultaneous analysis is possible
- Computer Eucentric stage with 5axes motorisation—X,Y: 150mm x 110 mm; Tilt: -20/+90 degrees
- One-Button selectable High Vacuum (HV) / Low Vacuum (LV) Modes
- Ecological design by clean Turbo Molecular Pumping
|
S-3400N Fully Automated VP-SEM
 |
|
S-3400N is Hitachi’s newest addition to a world-class Variable Pressure SEM line-up. Riding on the success of the S-3000 series instruments, the S-3400N offers advancement in automation including full filament saturation and “no touch” objective aperture alignment.
Features:
- A new analytical chamber provides a total of ten ports with three high take off angle ports for EDS, Full Focusing WDS, PBS, EBSD and XRF
- A BSE detector allows TV rate scanning and high resolution imaging
- Patented Quad Bias and SE Bias Accelerator Plate provide superior low voltage performance for both high and variable pressure vacuum conditions
- Large Analytical Chamber with 5-Axis, Computer Eucentric Stage
- New, 5-Segment, Ultra Thin, Backscattered Electron Detector capable of TV rate observation
- Fully Automated with One Button Automatic "No Touch" Objective Aperture Alignment
- Turbo Molecular Pump (TMP) provides a fast and efficient pump down time
|
|
|
Tabletop Microscope |
TM-1000 Tabletop Microscope
 |
|
Our new compact tabletop microscope invites you to the micron world!
The first Scanning Electron Microscope for a favourable price. To complete our range of Scanning Electron Microscopes (SEM) Hitachi has developed its first TABLETOP Electron Microscope - the TM-1000. The TM-1000 is designed for researchers who want to break through the limits of the Light Microscopy and close up to sophisticated magnifications up to 10.000 x.
A compact tabletop microscope invites you to the stereoscopic micron world:
- Compact size
- Easy to use
- Solid construction
- Superior resolution and higher magnification than an optical microscope
- Ideal for wide variety of applications
Features:
- Energy-saving design and size
- Easy to use - like a digital Camera - Ready to start in 3 minutes
- No coatings required for observing a non-conductive sample
- Stereoscopic morphological observation with greater depth of focus
- One-Button selectable High Vacuum (HV) / Low Vacuum (LV) Modes
- Ecological design by clean Turbo Molecular Pumping
|
|
|
Enquiries Contact |
| Contact Person (s) |
Francis Khong & Gary Goh |
| Email |
|
| TEL |
+65 6481-2050 |
| FAX |
+65 6481-8090 |
| Enquiry |
|
|
|
 |
Related Links |
|
Japan HQ Site (English) 
